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IEC 62276 Ed. 4.0 b:2025
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Single crystal wafers for surface acoustic wave (SAW) device applications - Specifications and measuring methods
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Full Description
This document applies to the manufacture of synthetic quartz, lithium niobate (LN), lithium tantalate (LT), lithium tetraborate (LBO), and lanthanum gallium silicate (LGS) single crystal wafers intended for use as substrates in the manufacture of surface acoustic wave (SAW) filters and resonators.
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R00000947
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