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IEC 62047-53 Ed. 1.0 en:2025
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Semiconductor devices - Micro-electromechanical devices - Part 53: MEMS electrothermal transfer device
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Full Description
IEC 62047-53:2025 This part of IEC 62047 defines the test methods for the performances of MEMS electrothermal transfer device. The document is applicable to the MEMS electrothermal transfer devices used in airbags, petroleum and mineral detection, igniters and detonators.
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